Cascade Microtech has launched two new Pyramid parametric probe cards that allow single-pass high performance DC and RF measurements and reduce the cost of parametric production test for semiconductors with advanced process nodes at 65 nm, 45 nm and beyond. These leading-edge probe cards leverage Cascade Microtech’s new Pyramid Plus parametric probe card manufacturing technology. Pyramid Plus provides greater mechanical performance, lower leakage, low contact resistance and lowest inductance to rapidly deliver the most accurate and reliable measurements of ever-smaller process monitoring test structures, said the supplier.

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According to Cascade, the exclusive Pyramid Plus membrane manufacturing process enables multiple specification improvements such as state-of-the-art leakage performance to 1 fA with a 5-second settling time, improved parametric performance, and reliable contact on smaller test pads. Additionally, the manufacturer claims that its membrane technology is unique in its ability to integrate 20 GHz transmission lines and guarded traces to the probe tip, respectively reducing crosstalk and improving settling time.

As chip geometries decrease and process complexities increase, the difficulties of measuring key parametric indicators include smaller DC currents, lower leakages, and tighter interconnection geometries. In addition, RF techniques are becoming critical production tests to measure RF passive components, high-speed CMOS technologies, and circuit reactance on small junctions. Cascade Microtech said its advanced Pyramid probe card technology is unique in its ability to make these low-level DC measurements while at the same time facilitating RF measurements in a single solution.

Pyramid Plus technology enables probing of 30 microns squared probe pads. Also, its unique MicroScrub technology nets consistently smaller scrub marks and uniform marking, yielding less particle generation that can contaminate the wafer, essential for in-line parametric testing, noted the supplier. MicroScrub allows the same probe card to be used for both Cu and Al pads, reducing the number of probe cards, probers and setups, lowering the cost of ownership. The permanent probe tip alignment and consistent low contact resistance of Pyramid probes extend the probe card lifetime, setting a new standard in low maintenance overhead, stated Cascade.

The parametric Pyramid Probe cards are available in either DC only (PDC50) or DC plus RF (PRF50) configurations, with options for pad size and leakage specifications.

www.cascademicrotech.com